Eutecnics, Inc.


Alexander Kran, Executive Vice President
3 Post Office Square
Acton, MA 01720
USA
Phone: (978)263-9998
Fax: (978)263-9942
Click here to send mail:
Eutecnics Series ES-220 systems are full-featured automatic inspection and metrology systems, capable of 300-mm silicon wafer robotic handling. Defect sensitivity is 0.45 µm for patterns, and >0.10µm for surface particles. ES-220 systems are cost-effective, turnkey solutions for both in-line and back-end of the line semiconductor inspection and process monitoring. Machine vision modules can be paralleled to achieve required throughput. Systems are suitable for inpecting wafers before and after dicing (chips), screening and evaporation masks, ball-grid arrays, and flat panel displays.
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