Modutek Corp.
Doug Wagner, President
6387 San Ignacio Avenue
San Jose, CA 95119
USA
Phone: (408)362-2000
Fax: (408)362-2001
Modutek Corp. manufactures the most complete line of process modules and related equipment for the semiconductor, hard disk, and flat panel wet process market. Aside from custom designs, our standard product line includes:
- Megasonics - cleaning systems and rinsers, direct and indirect
- Wafer Reclaim Systems
- CFC-free recirculators
- High temperature filtered recirculating etch systems
- PVDF/Teflon autolids
- Baths - Quartz, Teflon, filter etch, nitride etch, positive resist developer, constant temperature quartz, heated quartz, subambient, stainless, and teflon-coated stainless
- Ultraclean rinsers
- Chemical Injection Systems
- Process controllers/timers
- FPD processing modules
- Neutralization System (Point-of-Use, Continuous Flow, and Batch)
- On-site Service
- Process Station Rework
- New Process stations (Manual, SemiAuto, Automated)
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