MKS Instruments, Inc.


2 Tech Drive
Suite 201
Andover, MA 01810
USA
Phone: (978)645-5500
Fax: (978)557-5100
Click here to send mail:

MKS Instruments, Inc. is a global provider of instruments, subsystems and process control solutions that measure, control, power, monitor and analyze critical parameters of advanced manufacturing processes to improve process performance and productivity.

Our products are derived from our core competencies in pressure measurement and control, flow measurement and control, gas and vapor delivery, gas composition analysis, residual gas analysis, leak detection, control and information technology, ozone generation and delivery, RF & DC power, reactive gas generation, and vacuum technology.

Our primary served markets are manufacturers of capital equipment for semiconductor devices, and for other thin film applications including flat panel displays, solar cells, and data storage media. We also leverage our technology in other markets with advanced manufacturing applications including pharmaceutical and medical, energy generation, air and gas analysis, material processing and industry.


Go to TechExpo Homepage.
© TechExpo Corp.™, 2011;